Try http://www.kdf.com/ , they have a system that can sputter 3 targets in
line



Maurice H. Norcott
Senior Technician
Silicon Genesis Corporation
590 Division Street
Campbell, CA 95008

408-871-3948 Office
408-977-6333 Pager
[email protected]

-----Original Message-----
From: Satej Chaudhary [mailto:[email protected]]
Sent: Tuesday, March 26, 2002 10:20 AM
To: [email protected]
Subject: [mems-talk] Costs of setting up a lab


hi
I am working on a business plan for setting up a
microfluidics startup. Could anybody familiar with
costs of setting up a lab etc help me with quotations
for some instruments like
1. Thermal evaporator for Al Cr Au
2. Sputtering machine for SiO2

Are you aware of some "industrial grade 1000 A metal"
depsition methods or the  cheapest way to deposit a
thin metal film?

All I need to do in my application is etch a track of
closely spaced square metal electrodes on a plastic
substrate or something.

Thank you
Satej
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