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MEMSnet Home: MEMS-Talk: Cu Electric Deposition in Cleanroom?
Cu Electric Deposition in Cleanroom?
2002-03-28
Wuyong Peng
2002-03-28
Henry Yang
2002-03-29
Wuyong Peng
2002-03-29
Heaton, Monte
2002-04-01
Bill Moffat
2002-04-01
Henry Yang
2002-04-01
Wuyong Peng
Cu Electric Deposition in Cleanroom?
Wuyong Peng
2002-03-29
Yes. It is also called plating. Any idea I can do it in a cleanroom environment?
Thanks in advance.

Wuyong Peng


----- Original Message -----
From: "Henry Yang" 
To: 
Sent: Thursday, March 28, 2002 9:30 PM
Subject: Re: [mems-talk] Cu Electric Deposition in Cleanroom?


> WHat do you mean electric depositon? Is that the same as electrodeposition,
> as in electroplating?
>
> Henry Yang
>
> "Wuyong Peng" @memsnet.org on 03/28/2002 09:25:51 AM
>
> Please respond to [email protected]
>
> Sent by:    [email protected]
>
>
> To:    
> cc:
> Subject:    [mems-talk] Cu Electric Deposition in Cleanroom?
>
>
>
> Does anyone know if there is a cleanroom that allow Cu electric deposition
> and
> etching? Thank you.
>
> Wuyong Peng
> MRC, NJIT
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