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MEMSnet Home: MEMS-Talk: Cr/Cu wet etching
Cr/Cu wet etching
2002-03-29
Jai Shinh
2002-04-01
Bill Moffat
Cr/Cu wet etching
Jai Shinh
2002-03-29
Hello,

Could anyone help me to solve the problem of wet etching Cr/Cu?  The copper is
on top of the chrome.

I have a hard time protecting the copper when etching the chrome.

For chrome etchants, I've tried 1020 AC from the Transene, and CR-4.

The pattern is 40 microns in width, and Cr/Cu is 100 A/ 1 um.  The undercut is
severe.

Any suggestions will be greatly appreciated.



Regards,

Jai
Yahoo! Greetings - send greetings for Easter,  Passover

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