A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: RIE gases
RIE gases
1996-08-08
Peter DOWSETT
RIE gases
Peter DOWSETT
1996-08-08
Hello,

A colleague of mine is having trouble finding a suitable gas for
reactive ion etching of Ni and Ti thin films.

Does anyone have any good ideas?

Thank you, Peter Dowsett
M. Eng. student, Micro Machines Research Group
Electrical Engineering, RMIT
home page http://minyos.its.rmit.edu.au/~psd


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
MEMStaff Inc.
MEMS Technology Review