Hello Wuyong:

Innovative Micro Technology has deposition and etch capabilities for a large
portion of the periodic table, including Cu.  Please contact me directly for
more information.

Regards-Monte

Monteith G. Heaton 
VP Marketing and Sales
Innovative Micro Technology
75 Robin Hill Road * Santa Barbara, CA  93117
Ph:  805-681-2852 * Fx:  805-967-2677
[email protected]   * www.imtmems.com

_________________________________________
"Your strategic partner for MEMS design and 6" wafer
manufacturing services with 0.355m photolithography,
30,000 sq. ft. fab, and non-CMOS materials flexibility,
including metals/magnetics."

-----Original Message-----
From:   Wuyong Peng [mailto:] 
Sent:   Thursday, March 28, 2002 9:26 AM
To:     [email protected] 
Subject:        [mems-talk] Cu Electric Deposition in Cleanroom?

Does anyone know if there is a cleanroom that allow Cu electric deposition
and etching? Thank you.
Wuyong Peng
MRC, NJIT
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