Dear fellow MEMS Researchers,

I am interested in building 3-D structures out of a (photoimageable)
polymer material by using a sacrificial release layer underneath.
Has anybody done this before?
Which material might be suitable as sacrificial layer? It needs to
be patternable, approx. 15um thick and not attacked by the polymer's
solvent or developer, but removable without attacking the polymer.
Sound like a tricky question - and I'm not even a chemist ...
I am (within limits) flexible with the choice of polymer and intend
to spray it on after the sacrificial layer is patterened.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore