Hello,

I'm interested in talking to someone regarding a "starting point" process for an
STS Advanced Oxide Etcher. We have a used AOE tool coming in but the STS folks
aren't willing to share much process info with us ??

In particular, I'm trying to etch ~ 6-7 micron doped oxide and may be able to
use a silicon hardmask.

Any help would be greatly appreciated. Please leave your phone number if I can
call you back and discuss  the  issue in greater detail.

Best regards -

Neo
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