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MEMSnet Home: MEMS-Talk: SV: [mems-talk] Anodic Bonding of Si to Pyrex
SV: [mems-talk] Anodic Bonding of Si to Pyrex
2002-04-03
Adriana C Lapadatu
SV: [mems-talk] Anodic Bonding of Si to Pyrex
Adriana C Lapadatu
2002-04-03
>Has anyone ever anodically bonded pyrex to both sides?  All the
literature
>I read only describes the process for one side.

You can check:
M. Despont et al, "Fabrication of a silicon-Pyrex-silicon stack by A.c.
anodic bonding",
Sensors and Actuators A55 (1996), pp. 219-224.



Adriana Lapadatu, Ph.D.
Technology Development

SensoNor asa
Knudsrxdveien 7
P.O.Box 196
N-3192 Horten
Norway

tel: +47 33 03 50 79
Fax: +47 33 03 51 05

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