I know this has been asked many times over the past months, but does anyone
know of a non-university CMP service provider for planarization of blanket
poly-Si and oxide films over patterned 100mm Si substrates? Looking for a
long-term vendor, not one-shot project support.

Now that Prodeo's service doesn't exist, there seems to be a hole in the
market. Anyone out there filling it?

Keith Miller

Microfabrication Process Engineer
JDS Uniphase
MEMS Business Unit
3026 Cornwallis Road
P.O. Box 13942
Research Triangle Park, NC 27709
T-919-314-2297
F-919-314-2350
[email protected]