Neo,

What is the oxide doped with?

Greg Miller
KVH

-----Original Message-----
From: neo man [mailto:[email protected]]
Sent: Tuesday, April 02, 2002 3:46 PM
To: [email protected]
Subject: [mems-talk] Need help with STS AOE Etcher


Hello,

I'm interested in talking to someone regarding a "starting point"
process for an STS Advanced Oxide Etcher. We have a used AOE tool coming
in but the STS folks aren't willing to share much process info with us
??

In particular, I'm trying to etch ~ 6-7 micron doped oxide and may be
able to use a silicon hardmask.

Any help would be greatly appreciated. Please leave your phone number if
I can call you back and discuss  the  issue in greater detail.

Best regards -

Neo
Yahoo! Tax Center - online filing with TurboTax
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