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MEMSnet Home: MEMS-Talk: Uniformity issues in E-beam evaporation
Uniformity issues in E-beam evaporation
2002-04-06
Manoj Wadhwa
2002-04-08
Parshant Kumar
2002-04-08
[email protected]
2002-04-09
[email protected]
Uniformity issues in E-beam evaporation
Manoj Wadhwa
2002-04-06
Hello everyone,

We are establishing new MEMS facility. We are not able to decide whether to go
for E-beam evaporation or metal sputtering, in context to uniformity
requirements in MEMS for 6" diameter wafers. Can someone suggest low cost, low
throughput sputtering system?

Thanks,

Manoj Wadhwa
Manager - VLSI
SCL - India

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