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MEMSnet Home: MEMS-Talk: Young's Modulus
Young's Modulus
1996-08-19
Angela Rasmussen
Young's Modulus
Angela Rasmussen
1996-08-19
I am working with mems devices that were fabricated using MOSIS's ORBIT
run.  I have been looking in articles and other resources, but have not
been able to find values for young's modulus for any of the materials in
this run.  Is anyone working with this process?  Or does anyone know
where I could find the modulus values for the materials in this process?
Thank you.

-Annie


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