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MEMSnet Home: MEMS-Talk: Cr/Au delamination
Cr/Au delamination
2002-04-09
Jiang Zhe
2002-04-09
shay kaplan
2002-04-09
Jiang Zhe
2002-04-09
Mike Pedersen
2002-04-09
adnan merhaba
2002-04-09
Atzmon Ofri
2002-04-09
[email protected]
2002-04-09
Maurice Norcott
2002-04-09
Henry Yang
2002-04-10
Henry Yang
Cr/Au delamination
Maurice Norcott
2002-04-09
30 min 49% HF is enough to undercut the Cr/Au

-----Original Message-----
From: Jiang Zhe [mailto:[email protected]]
Sent: Tuesday, April 09, 2002 8:40 AM
To: [email protected]
Subject: [mems-talk] Cr/Au delamination


I have a 300A Cr/2500A Au delamination problem. Cr/Au

was deposited on p-type Si <100> wafer. Then it was
put

into concentrated HF and Cr/Au layer were peeled off

after 30 minutes. The pre-clean (RCA clean and a 2min

Ar plasma pre-etch) was well done before sputtering.

My question is, what's the possible reason of the

delamination? Any suggestion? Thanks!

Jiang
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