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Surface tension on the wafer
2001-07-28
gururaj shenoy
Surface tension on the wafer
gururaj shenoy
2001-07-28
Hello all

I have a problem of having non uniform surface tension on the silicon
Nitride wafer. I tested it by putting some water on the surface and found
that water was spreading away from some region on the wafer while other area
was having water on the surface.It looks like there is some hydrophobicity
on the wafer.

Can any one suggest me the way to tackle this problem and get uniform surfac
tension (uniformity) on the surface of the Silicon Nitride wafer.

Thanks


Gururaj Shenoy
Louisiana Tech university

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