Hi,everyone:

     I am trying to bond PDMS with silicon. I followed the recipe in some
references: cleaning both surfaces with aceton, alcolhol and N2 dry then
using oxygen plasma to treat both surfaces for 1 min. But results are
bad, they cannot be bonded together. Any other recipes I can follow or
some important steps missed in my operation? Please give me some
suggestions.

    Another question is that if developed photoresist can be bonded with
other material by heating up to higher temp (150degreeC)?

Any info is highly appreciated. Thanks.

Bo

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