With 10 to 15 um diameter, you can go as deep as 150 um at least, depending
on the process conditions an the time you allow the process to run (the
etching rate will decrease with increasing depth).

Best regards, B Volland

P.S. What you need it for?
-----Urspr|ngliche Nachricht-----
Von: Xing Yang 
An: [email protected] 
Datum: Dienstag, 9. April 2002 23:15
Betreff: [mems-talk] DRIE of small holes


>I am trying to find out for a colleague of mine how deep one can etch
>small holes (5um, 10 um, and 15 um) in DRIE.