Hi, dear all,
     Electrostatic actuators are becoming more and more important in MEMS
because they can generate the great force to manipulate the micro structures
(for example, turning switches). However, it seems that not much theoretic
researches have been developed on this field, especially theoretic analysis
works.

     I am interested in the following phenomena: applying a voltage on a thin
film heater (which is deposited on Silicon beam), voltage generates current,
heating should be caused by the current, then the silicon beam bends to one
direction because of Expansion Coefficient difference between the metal heater
and silicon material. Displacement of the beam is what I want to know.

    The parallel capacitor, its size is in micron order, is another interesting
structure to be analysed. Fix the left-end of the up-plate and fix the down-
plate at the same time, when I apply a voltage to the capacitor, the right-end
of up-plate will be bent (moves close to down-plate). Simply in one sentence,
firstly applying a voltage then a displacement generated. Again, displacement of
the up-plate is what I want to know. Are there any literatures about the
phenomenon by considering the properties of material?

     I hope that I state my questions clearly. Would you please provide me any
information on my questions? Would you please tell me some websites, books or
papers (some mathematical analysis in them) on the microstructures mentioned
above? Any helps and discussions on this matter with me will be highly
appreciated.

     Thank you very much.

 Jun Yao
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