Hello,
I wish to deposit a Polysilicon film on glass wafers (Pyrex 7740, 100 mm
diameter, 0.5 thick) using the LPCVD technique. Since we cannot run such a
process in our lab, I am looking for somebody for whom it is not a
difficulty. Please contact me if you think that you can help me or if you
know somebody who might be able to help me. Many thanks.
Thierry Corman
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Thierry Corman
Royal Institute of Technology
Department of Signals, Sensors and Systems
Instrumentation Laboratory
S-100 44 Stockholm, Sweden
Tel : +46 8 7907789
Fax : +46 8 100858
E-mail : [email protected]
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