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MEMSnet Home: MEMS-Talk: LPCVD PolySi on glass
LPCVD PolySi on glass
1996-08-22
Thierry Corman
LPCVD PolySi on glass
Thierry Corman
1996-08-22
Hello,

I wish to deposit a Polysilicon film on glass wafers (Pyrex 7740, 100 mm
diameter, 0.5 thick) using the LPCVD technique. Since we cannot run such a
process in our lab, I am looking for somebody for whom it is not a
difficulty.  Please contact me if you think that you can help me or if you
know somebody who might be able to help me. Many thanks.

Thierry Corman

_________________________________________

Thierry Corman
Royal Institute of Technology
Department of Signals, Sensors and Systems
Instrumentation Laboratory
S-100 44 Stockholm, Sweden

Tel      : +46 8 7907789
Fax     : +46 8 100858
E-mail : [email protected]
_________________________________________


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