A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Cr/Cu wet etching & electrochemical reactions?
Cr/Cu wet etching & electrochemical reactions?
2002-04-10
Jai Shinh
2002-04-12
Michael D Martin
Cr/Cu wet etching & electrochemical reactions?
Jai Shinh
2002-04-10
Hi,
I have a question about possible electrochemical
reactions when wet etching Cr/Cu.
Copper is on top of Chrome, so I etch the copper
first, then lithography, and etch the chrome.
I tried 1020 AC and TFD from the Transene, and CR-4.
During etching, I observed that if there is a tiny bit
of copper left exposed to the chrome etchant, the
chrome etchant won't attack the chrome.
Later on I used HCl.  If I touched the chrome with my
stainless steel tweezers, HCl will etch Cr.
I think there are some electrochemical reactions going
on.
Any insights will be greatly appreciated.

Jai
Yahoo! Tax Center - online filing with TurboTax
http://taxes.yahoo.com/

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Addison Engineering
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.