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MEMSnet Home: MEMS-Talk: Capacitive pressure sensor
Capacitive pressure sensor
2002-04-12
Johan Coosemans
2002-04-12
Mike Mattes
2002-04-12
[email protected]
Capacitive pressure sensor
[email protected]
2002-04-12
> I am looking for a capacitive pressure sensor, preferably in die form,
> to be used in biomedical applications. The maximum absolute
> pressure to
> be measured is 140kPa (1.4 bar). Does anyone know who has this kind of
> sensors commercially available?

NovaSensor make piezoresistive, rather than capacitive, pressure-sensor
chips,
in roughtly that absolute pressure range, and sells some of the them in die
form.
These are probably easier to use than capacitive pressure sensors.
See www.novasensor.com for data sheets.

        --Kirt Williams Agilent Technologies

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