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MEMSnet Home: MEMS-Talk: Cr/Cu wet etching & electrochemical reactions
Cr/Cu wet etching & electrochemical reactions
2002-04-15
Jai Shinh
Cr/Cu wet etching & electrochemical reactions
Jai Shinh
2002-04-15
Mike,
Thank you very much for confirming my observation.
If it is not too much trouble, I wonder if you could
tell me where to find some literature on the
electrochemical effects between Cr/Cu.  I'd appreciate
it a lot.

Best,
Jai

----- Original Message -----
From: "Michael D Martin"

To: 
Sent: Friday, April 12, 2002 8:10 AM
Subject: Re: [mems-talk] Cr/Cu wet etching &
electrochemical reactions?


> There is a strong electrochemical effect between the
two metals. We have
> actually used this effect to selectively protect
chrome in Cr etch. One
> solution may be to bias the chrome, if this is
feasible.
>
> -Mike
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