Dear fellow MEMS Researchers,

In my experiment, I use PMMA (Microchem) as sacrificial layer. The process is
following,

First spincoat PMMA at 800rpm for 30 sec, and prebake at 180 centi degree for
1 hours.

And then deposit the other kind of material at 95 centi degree for over 30
hours.

When experiment finished, I use acetone to remove the PMMA. But I find it is
very difficult to remove PMMA layer completely. I have tried water bath at 70
centi degree, but there are no obviously change.

Has anybody done this before? Any suggestion are highly appreciated.

Cheers

Peng
>=========================================
>Dr. P. Jin
>Research Associate
>School of Manufacturing and Mechanical Engineering
>The University of Birmingham
>Edgbaston, Birmingham B15 2TT
>Tel:  ++44-121-414-4256
>=========================================