My device has a Ti-Au metal layer and is also
processed through DRIE Si etch.  The Si etch leaves a
polymer that is hard to remove and causes shorts in my
device if any residue is left behind.  Does anyone
have any hints about how to remove the polymer with
out etching the Ti?

Thanks,
James
Yahoo! Tax Center - online filing with TurboTax
http://taxes.yahoo.com/