Dear Colleagues:

If one follows the empirical rules for a given spin-coatable material to
achieve some specified thickness, presumably one will achieve this
thickness, plus or minus some absolute and/or percentage amount.  Are there
systematic studies about errors of this type, or does there exist some
accumulated wisdom about it?  One would guess that such errors depend on
many factors, including the material used, etc., etc.  My particular
interest is in polyimide at a nominal10 microns and also SU-8, at nominal 2
microns.

Of course, one can measure the thickness for each substrate coated.  But
had I done that, I would not be posting this plea.

Tom Jones


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Thomas B. Jones
Professor of Electrical Engineering
University of Rochester
P.O. Box 270126
Rochester, NY  14627-0126    (USA)
phone: 1-585-275-5233   fax: 1-585-273-4919
email: [email protected]
http://www.ece.rochester.edu/~jones
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