I need recommendations for cleaning recipes for preparing the surfaces of
99.6% alumina for  Ti/Au metallization (e-beam evaporated).  My substrates
are 0.005" alumina, polished, and with some surface debris from laser
micromachining. I am interested in debris removal and most important,
improved metal adhesion.

One recipe that has been suggested is:
        Ammonium hydroxide: water, 1:10, 30 seconds at room temp
        Water rinse 15 seconds
        HCl:water, 1:100, 30 seconds
        Water rinse, 1 minute
        Dry
        Evaporate

Any improvements/suggestions?

Thanks in advance,



 - Jim Beall 303-497-5989
   [email protected]