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MEMSnet Home: MEMS-Talk: TI Etch for Silicon Defects (Non-Chromium)
TI Etch for Silicon Defects (Non-Chromium)
2002-04-22
Art Glidden
2002-04-23
Michael D Martin
TI Etch for Silicon Defects (Non-Chromium)
Art Glidden
2002-04-22
Looking for information about a "TI" etch for finding defects in silicon
crystal. This was recommended as an effective, non-chromium etching process
for this purpose.

Thanks in advance for the help,

Art

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