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MEMSnet Home: MEMS-Talk: Teflon AF Adhesion Problem
Teflon AF Adhesion Problem
2002-04-19
Rishi Mulgund
2002-04-22
Mighty Platypus
2002-04-23
Jens Tuchscheerer
How to calculate the effective dielectric constant?
2002-04-24
JIAO JW
SU8 resistivity
2002-05-10
Mihaela Balseanu
Teflon AF Adhesion Problem
Jens Tuchscheerer
2002-04-23
Hallo Rishi Mulgund,
...you can try 1H, 1H, 2H, 2H-perfluorodecyltriethoxy silane. Make a  2%
solution of the fluorosilane in PGMEA (or 2-Butanon or ethanol) and spin on
it. Then bake the wafer 1000C for 10 mminutes. The silane is available at:
Lancaster Synthesis - www.lancastersynthesis.com
LS #16585 (catalog number)

good luck
Jens Tuchscheerer

----- Original Message -----
From: "Rishi Mulgund" 
To: 
Sent: Friday, April 19, 2002 10:02 PM
Subject: [mems-talk] Teflon AF Adhesion Problem


> Hello All,
> I am trying to Spin Coat Teflon AF 2400 onto a glass substrate but I am
> having problems getting the Teflon to uniformly coat because of adhesion
> problems.  I have heard a great deal of talk about using fluorosilane as
an
> adhesion agent, but I can't seem to find it anywhere.  Does anyone know
> where I might be able to find this fluorosilane or have any possible
> solutions to my adhesion problem?
>
> Rishi Mulgund
>
> __________________________________________________
> Rishi D. Mulgund
> [email protected]
> (716) 274-4293
> CPU Box 273662
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