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MEMSnet Home: MEMS-Talk: TiN as thin film resistor
TiN as thin film resistor
2002-04-24
TEL Klaus Beschorner
TiN as thin film resistor
TEL Klaus Beschorner
2002-04-24
Dear community,
for flexibility reasons, we would like to use Titanium-Nitride (TiN)
as a 20 Ohm/sq resistor film sputtered on top of AlSiCu.
I've searched around the net a lot, but I don't see TiN mentioned
or offered for this kind of application anywhere. Is there anything
really fundamentally wrong with it ? TCE is not an issue here.

thanks for advice
best regards,
klaus

--

                        (TEEL)          Tokyo Electron Europe Limited
                                        PVD Process Support  (ex MRC)
Klaus Beschorner                                   Tel +49-7033-45683
Drosselweg 6                                       Fax +49-7033-45631
71120 Grafenau, Germany                       Mobile +49-174 315 7754

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