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MEMSnet Home: MEMS-Talk: Wet etching TiW
Wet etching TiW
2002-04-25
Anke Stock
2002-04-25
___
2002-04-25
Justin Borski
2002-04-25
[email protected]
2002-04-25
Charles Ellis
Wet etching TiW
Anke Stock
2002-04-25
Hello to everybody,
is there someone who has experience in wet etching of TiW? I use a
mixture of HCl and H2O2, but it seems that there are small amounts of
TiW on the wafer after etching. Has someone experiences with parameters
like temperature, time, other mixtures or something else? Many thanks
for your help
Anke

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