A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: EDP vs. TMAH+ for MOSIS
EDP vs. TMAH+ for MOSIS
2002-04-25
Michael D Martin
EDP vs. TMAH+ for MOSIS
Michael D Martin
2002-04-25
Hi All,
    I'm trying to bulk etch some die we got from MOSIS and had planned
to use the TMAH+ solution (i.e. TMAH+Ammonium Peroxysulfate+silicic
acid) but we came across the following info from NIST:
http://www.mosis.org/Technical/Designsupport/nist-mems-1.html which
says you can use EDP for the post processing. Has anyone used EDP on
MOSIS chips? Is the Al alloy used in MOSIS just more resistant to it?

Any help would be appreciated
-Mike Martin

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
MEMS Technology Review
The Branford Group
Addison Engineering