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MEMSnet Home: MEMS-Talk: Thick Solgel deposition
Thick Solgel deposition
2002-04-25
Jon Doe
Thick Solgel deposition
Jon Doe
2002-04-25
Hi:

We consider to deposit about 100 um of Solgel on a
structured wafer possibly in multiple steps. The
Solgel has to have a defined index of refraction of
about 1.420. Does anybody have experience with thick
Solgel deposition and give me instructions as to
deposit it? Can sombody refer me to a Solgel
deposition service, possibly here in California.
Thanks very much in advance for your input.

Best regards,

Thomas
Thomas Wendling, Ph.D.
Principal Engineer
UltraPhotonics
48611 Warm Springs Blvd.
Fremont, CA 94539
[email protected]



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