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MEMSnet Home: MEMS-Talk: Spinning BCB on Nitride.
Spinning BCB on Nitride.
2002-04-29
Noah Clay
2002-04-30
Lester Lopez
2002-04-30
Noah Clay
2002-05-01
Bill Moffat
Spinning BCB on Nitride.
Noah Clay
2002-04-29
I'm having difficulty spinning BCB on nitride.  There appears to be a
consistent starburst or comet pattern on the wafer despite following the
manufacturer's instructions for dispensing the adhesion promoter and BCB
itself.  I'm using an eppendorf and dispensing until the wafer is
covered in the slow spin stage at 100RPM (I've tried not coating the
wafer completely, but the problem seems exacerbated in those instances).
I'm also dispensing at a level very close to the wafer and very
well-centered.  I've read that the comet pattern usually arises from air
bubbles in the BCB, but I've taken pains to allow settling prior to
dispense.  HELP!

Noah Clay

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