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MEMSnet Home: MEMS-Talk: Spinning BCB on Nitride.
Spinning BCB on Nitride.
2002-04-29
Noah Clay
2002-04-30
Lester Lopez
2002-04-30
Noah Clay
2002-05-01
Bill Moffat
Spinning BCB on Nitride.
Lester Lopez
2002-04-30
Noah,

What brand BCB are you using and how old has it been sitting? Does it
flow very slowly when you are dispensing it? I was
having the same problem spinning on a silicon wafer sample and it turned
out to be that the BCB had been sitting on the dispense bottle for some
time.  As soon as I got a new batch of BCB the problem was solved.

hope this helps,

Lester Lopez
University of South Florida

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