Hi,

  We plan to fabricate microlens arrays on quartz (fused silica).
The diameter of each microlens is in the range of 50-200um and
the f-# varies in the range of 2-10.
  We are considering to fabricate them using photoresist reflow
followed by RIE. Therefore, I am very interested to find any
reference that describes the fabrication process, including the
type of resist, detailed process for both reflow and RIE. Do you
have any recommendation?

  Thanks,
 -Ali :)
-------------------------
 Ali Razavi, Ph.D.
 Room 455, Manufacturing Research Center
 Gerogia Institute of Technology, Atlanta, GA 30332-0405
 Phone: 678-637-1634, Fax: 404-894-9342
 E-mail: [email protected]