I have come across LEDIT on a Mac before - I doubt it is still supported,
but you might check.  It is capable of saving in GDSII and CIF file
formats.

William Benard
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> Subject: [mems-talk] masks on a mac?
>
> So what software has anyone successfully used to design photomasks on a
> Macintosh?
>
> --Tom Metcalf