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MEMSnet Home: MEMS-Talk: Microlens fabrication
Microlens fabrication
2002-05-02
Rob Hardman
Microlens fabrication
Rob Hardman
2002-05-02
Dear Ali Razavi,

I have a copy of a paper written by E.M Strzelecka, G.D. Robinson, L.A.
Coldren and E.I. Hu of the Department of Electrical and Computer
Engineering University of California Santa Barbara entitled "Fabrication
of refractive microlenses in semiconductors by mask shape transfer in
reactive ion etching" in which they describe the fabrication of
microlenses using a PMGI resist from MicroChem. If you would like a copy
please send me your fax number and I would be happy to fax it to you.

Very Best Regards,
Rob Hardman
617-965-5511 ext.313
[email protected]

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