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MEMSnet Home: MEMS-Talk: GaP etching
GaP etching
2002-05-03
LimboChen
GaP etching
LimboChen
2002-05-03
Dear MEMS community,

where can we find out a chemical composition for wet etching GaP to the depth
of 1 #gm with high P-content ?
.

Thank you in advance for your answer.

L. Chen

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