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MEMSnet Home: MEMS-Talk: AMS 0.8 um,MEMS PRO process definition file
AMS 0.8 um,MEMS PRO process definition file
2002-05-03
Ahmed Salah
2002-05-07
Mary-ann Maher
AMS 0.8 um,MEMS PRO process definition file
Ahmed Salah
2002-05-03
Hi,
I'm making IR Static Earth Sensor based on bulk micromachining MEMS,it's based
on thermocouples,i'm using LEDIT MEMS PRO program for the layout of the
sensor,i'm using the technology of AMS 0.8 um.
My problem is in the 3D view of the sensor ,i need a PROCESS DEFINITION file for
the AMS 0.8 um,for MEMS PRO program to see the 3D view.

Thank you in advance.

bye,
Ahmed

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