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MEMSnet Home: MEMS-Talk: photoimageable insulator
photoimageable insulator
2002-05-03
Martin O. Patton
2002-05-07
shay kaplan
2002-05-07
___
2002-05-08
carlton watson
2002-05-06
Bill Moffat
2002-05-08
Greg Miller
2002-05-09
carlton watson
photoimageable insulator
Martin O. Patton
2002-05-03
Dear mems-talkers,

Is there a photoimageable insulator that can be applied to insulate trenches
in III-V wafers from metal contacts which cross the trenches?  I only have
wet chemistry, so don't tell me to RIE.

Thanks,

Marty

Martin O. Patton
Senior Research Engineer
Essential Research Inc.
6410 Eastland Road Suite D
Cleveland, Ohio 44142
www.er.com

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