Martin,
photoimageable Polymide or B.C.B. sounds like the answer. Bill Moffat
-----Original Message-----
From: Martin O. Patton [mailto:[email protected]]
Sent: Friday, May 03, 2002 11:14 AM
To: [email protected]
Subject: [mems-talk] photoimageable insulator
Dear mems-talkers,
Is there a photoimageable insulator that can be applied to insulate trenches
in III-V wafers from metal contacts which cross the trenches? I only have
wet chemistry, so don't tell me to RIE.
Thanks,
Marty
Martin O. Patton
Senior Research Engineer
Essential Research Inc.
6410 Eastland Road Suite D
Cleveland, Ohio 44142
www.er.com
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