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MEMSnet Home: MEMS-Talk: Problems with MEM CAD, ETherm
Problems with MEM CAD, ETherm
2002-05-09
Michael D Martin
2002-05-15
Michael D Martin
Problems with MEM CAD, ETherm
Michael D Martin
2002-05-09
Hi, Does anyone have experience with modeling hotplates or using the
ETherm module in MEM CAD? I am trying to model some hotplates with
meander type heaters and holes in them. The problem is that I keep
getting temps that are below the ambient temp that is set in a
convection-radiation boundary condition on the top and bottom of the
plate. The problem seems to occur between the metal heater and the holes
in a nitride support layer. Unfortunately, Coventor has NOT been too
helpful so far.

Thanks,
   Mike

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