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MEMSnet Home: MEMS-Talk: Multilayered SU-2075 structures
Multilayered SU-2075 structures
2002-05-10
Kris Armoogum
2002-05-12
Yohannes M Desta
Multilayered SU-2075 structures
Kris Armoogum
2002-05-10
Dear All,

Has anyone attempted to create a two layered structure using Su-
2075 where the top layer OVERHANGS the bottom layer?

I am trying to do this using conventional photolithography methods
but without success.

Because the Su-2075 is so transparent, it is difficult to judge the
exact exposure time so that the top layer is not crosslinked all the
way down to the wafer surface.

A sales rep from one of the Su-2075 manufacturers thinks this is
impossible.

Best regards.






Kris Armoogum
Microengineering & Biomaterials Group
Dundee University Tissue Engineering Centre
School of Engineering,
University of Dundee
Dundee DD1 4HN
Tel: 0044 1382 345641
Email: [email protected]

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