MEMS-talk

News	MEMSnet Home: MEMS-Talk: how to deposit PZT how to deposit PZT 2002-05-09 David Yen 2002-05-10 Haigh, Richard 2002-05-10 RobDavis 2002-05-13 Gurvinderjit Singh 2002-05-14 Christopher F. Blanford tin on copper oxide 2002-05-14 Robert Dean PLZT robotics 2002-05-22 Gurvinderjit Singh 2002-05-10 Michael Barger 2002-05-10 lucp1429 2002-05-12 TEL Klaus Beschorner 2002-05-13 Haigh, Richard Gold film 2002-05-20 Gurvinderjit Singh how to deposit PZT Gurvinderjit Singh 2002-05-13 _______________________________________________________________________________ Gurvinderjit Singh Ahluwalia Tel: +91-0731-488656 Laser Materials Division Fax: +91-0731-488650 Centre for Advanced Technology email: [email protected] Indore - 452 013 INDIA _______________________________________________________________________________ >Dear David The quality(Stoichiometry) of the film you get by rf or other supttering method may not be good, becuase PZT is multicomponent oxide system. The best method is to get film by sol-gel. Nowdays people are doing Pulse Laser Deposition (PLD) technique to get better quality films. Following references may be helpful: (1) "Pulse Laser Deposition" G.K.Hubler et al, MRS Bulletin, Feb. 1992 (26-27) (2) " Dielectric properties ..... PZ on Si by PLD", Journal of Applied Phys., 83,12, 1998(7803-7807) Gurvinder > -----Original Message----- > From: David Yen [mailto:[email protected]] > Sent: Thursday, May 09, 2002 6:22 PM > To: [email protected] > Subject: [mems-talk] how to deposit PZT > > Dear all, > > Does anybody have experience or idea of depositing PZT, especially > by sputtering? Thanks a lot. > > David > _______________________________________________ > [email protected] mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > [email protected] mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/ > _______________________________________________ > [email protected] mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.mems-exchange.org/ reply
Events
Glossary
Materials
Links
MEMS-talk