Rob

I have never had discussion with someone experienced with Sol-gel
methods....is this a multiple step process?

Yes, first a sol is prepared in a chemistry lab. This is a solution of
reactive inorganic precursors that will undergo polymerization. The
polymerization being initiated by hydrolysis. The second stage is to
deposit the film - this is usually done through spin casting of the sol
onto an appropiat substrate. In which film thickness is controlled by
applying successive sol layers. Thermal treatments may be applied to
each layer to pyrolise (remove residual carbon) or to dry off solvent.

Don't you have to thermal
process after deposit?

Yes, When the desired film thickness has been achieved the deposited
film which is amorphous, needs to be sintered.

How do you control density (porosity)?

Density is in part dependent on the sintering that you are using,
temperature and gas etc. It will also depend on the amount of carbon in
the sol and the drying conditions used between each layer deposition.


 Do you have to apply a DC field above the curie temp to group the
domains?

Yes, poling is necessary, but this is done below the curie temperature!
This can be done in oil or using corona discharge

Just wondering....
Rob

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Haigh, Richard
Sent: Friday, May 10, 2002 1:50 AM
To: [email protected]
Subject: RE: [mems-talk] how to deposit PZT


David

I am not too familiar with sputtering PZT; I believe that this can be
done with a pzt target. I don't know how you would introduce doping ions
to your films. I am not too sure of the conditions used e.g. carrier
gas, type of sputtering system etc.

However, I have deposited thin films of pzt with sol-gel by means of
spin coating (chemical solution deposition). An advantage of this
process is that it allows good control over the homogeneity of the
deposited film. In other words sol gel rout allows you to control the
concentration of dopants, and to uniformly distribute them throughout
the deposited film. Please note that pzt needs to be sintered and
thermal treatments can interfere with other processes that you may be
considering on your wafer



Regards


Richard

-----Original Message-----
From: David Yen [mailto:[email protected]]
Sent: Thursday, May 09, 2002 6:22 PM
To: [email protected]
Subject: [mems-talk] how to deposit PZT

Dear all,

    Does anybody have experience or idea of depositing PZT, especially
by sputtering? Thanks a lot.

David
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