MEMS-talk

News	MEMSnet Home: MEMS-Talk: The Temperature of DRIE The Temperature of DRIE 2002-05-15 Jia Zhou 2002-05-15 tangyz 2002-05-15 Rick Williston 2002-05-15 ___ 2002-05-15 Jeff Zahn 2002-05-15 ___ MEMS Rotary motors 2002-05-16 Robert Dean 2002-05-15 [email protected] 2002-05-15 [email protected] The Temperature of DRIE Jia Zhou 2002-05-15 Who knows the temperature in DRIE when silicon is deep-etched, say 500microns? Thanks. reply
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