> I find this hard to believe, how did they measure it?  Do you
> know or is
> there someone I can contact?

It is measured by placing temperature dots on the wafers.
Temperature dots permanently change color when a certain temperature is
exceeded.
They come in different temperatures, with several on a strip of tape.
You can watch them turn dark through the window in the top of the chamber
as the etch proceeds.
They can be ordered from Omega.

If you use this technique, you can cover the dots with Kapton tape for
protection.
Poke tiny holes in both the Kapton tape and dot tape to let the air out.

        --Kirt Williams Agilent Technologies