Check out ref 23 on the SU-8 supersite:
http://aveclafaux.freeservers.com/SU-8.html

Zhong-geng Ling, Kun Lian, Linke Jian, "Improved patterning quality of
SU-8 microstructures by optimizing the exposure parameters", in Proc.
SPIE vol. 3999, SPIE (2000) : 1019-1027 : at last, a thorough
investigation of the SU-8 absorption in the UV and up to the NIR,
leading to many process improvements (aspect ratio 25 with 360um thick
layer). Very interesting!

The absorbance spectra are indeed excellent and useful, with the data
plotted at alpha (absorption coefficient, in m-1) vs. wavelength (in nm)
where A=10^(-1*alpha*thickness).

Some of the data is tabulated:
Wavelength  alpha
330 nm      10^5 m-1
356 nm      10^4 m-1
380 nm      10^3 m-1
454 nm      10^2 m-1

Chris

In message <[email protected]>
[email protected] writes:
> Hello,
>
> Can anyone provide me some information on SU8 light
> absorption / reflectance properties vs. wavelength?
>
> thanks & regards,
>
> Zhan Ping

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: (44)/(0)-1865-282603; Fax: (44)/(0)-1865-272690
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