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MEMSnet Home: MEMS-Talk: AZ4620 etch rate in CHF3
teflon coating
2002-05-14
Satej Chaudhary
AZ4620 etch rate in CHF3
2002-05-15
W. Wang
AZ4620 etch rate in CHF3
W. Wang
2002-05-15
Anybody has any data on the AZ4620 etch rate in CHF3 gas?


-weichih
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