Hi Igor,

we have a platinum lift off process which works very well.  It adheres well
to silicon dioxide with Titanium as a stiction layer.

Helen.

Dr Helen Berney, MIEEE, MEFB
National Microelectronics Research Centre, Prospect Row, Cork, Ireland
Tel +353-21-4904010   Fax 353-21-4270271   Email [email protected]
Webpage  http://www.nmrc.ie/research/transducers-group/index.html

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of iog
Sent: 15 May 2002 18:10
To: [email protected]
Subject: [mems-talk] Pt on SiO2


Hello all,

Who can tell if Pt has good adhesion to SiO2? And what can it be etched
with?

Thanks & Best regards,

Igor
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