>Hello,
I am trying to find publications on MEMS electrostatic rotary motors. I
have the 1990 publication by Dr. Mehran Mehregany at Case Western
University entitled, "A Study of Three Microfabricated Variable-capacitance
Motors." Are there more recent publications for this type of device?
Sincerely,
Robert Dean
Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849
Voice: 334-844-1838
Fax: 334-844-1898
Email: [email protected]